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The INFICON Augent Optical Plasma Gauge is a compact and intelligent solution for vacuum monitoring.
Augent combines two sensor technologies into one compact device for gas type monitoring from 1 x 10-7 to 5 mbar and to measure total pressure from 1 x 10-7 mbar to atmosphere at the same time. Augent is protected by an integrated Pirani sensor to switch off plasma above 20 mbar. The fast optical measurement principle allows the detection of in principle any type of gas.
Advantages
High speed leak detection allows chamber leak test
Increase of productivity and yield
Long life time, no filament burns, air inrush protection
Withstand process chemistry
Smart algorithm for easy integration
Compact design and small footprint
Reliable and fast start up
Typical Applications
Chamber leak check, faster RoR (rate of rise) test
Leak check to find internal leaks from gas supply lines
Real time end point control
Gas type and concentrations control