INFICON Transpector MPH Gas Analysis System

The ever increasing price of silicon wafers and demand for finished products means that scrapped wafers cost more than ever before. Thus, understanding your process and monitoring for defects has become a much higher priority in semiconductor fabrication centers. The Transpector MPH Gas Analysis System is designed to unlock your process with industry leading performance for all of your gas analysis applications to help maximize chip yields and minimize tool downtime. Combined with a low overall cost of ownership and high mean-time-between-failures, Transpector MPH helps your bottom line more than any other residual gas analyzer (RGA) on the market.

INFICON has leveraged its expertise in gas analysis process control equipment to create an RGA with industry-leading data collection speed, minimum detectable partial pressure and signal-to-noise ratio. All this, without sacrificing any of the reliability you have come to expect from INFICON Transpector Gas Analyzers.

Features

Max. Data Rate of 1.8 ms per point for Analog Scans and Selected Peaks

TCP/IP Ethernet connectivity

Dual filaments

Field replaceable Electron Multiplier

Combined anode, cathode and repeller filament kit

Shorter sensors minimize installed footprint

Nine-decade dynamic range

MDPP of <2E-15 Torr (100 amu)

Increased Signal-to-Noise ratio

Interchangeable sensors and electronics

Sensors are assembled, tested and double bagged in a cleanroom environment

RoHS Compliant