INFICON Transpector CPM 3 Residual Gas Analyzer

Performance, Reliability, and Versatility

INFICON Transpector CPM has been the market-leading Residual Gas Analyzer (RGA) process monitoring system in the semiconductor industry for over a decade. Now Transpector CPM 3 provides industry leading measurement speed and sensitivity through a field proven pumping and inlet system integrated with a new sensor and electronics. Transpector CPM 3 is the ideal RGA process monitor for new and established semiconductor processes such as ALD, CVD, PVD, and Etch.

Transpector CPM 3 provides proven return on investment to our partners through:

Industry Leading Measurement Technology

Robust and Adaptive Architecture

Ease of Maintenance

Superior Product Support

Features

Residual Gas Analyzer for ALD, Etch, CVD and 300 mm Degas—enables real-time process monitoring and analysis

ALD-Ready with 1.8 ms per point (555 points per second) measurement speed

Field-proven durability and reliability in the most demanding CVD and Etch applications

Application Integration—Transpector CPM becomes a powerful process monitoring and diagnostics tool when integrated with FabGuard software and supported by INFICON world-class applications experts

Compact size—allows for easy integration into production semiconductor equipment

Hexblock™ with up to three pressure inlets and reduced surface area to minimize surface reactions and response times

Capacitance Diaphragm Gauge (CDG)—CDG allows user to monitor the process pressure and automatically protect the system from pressure excursions

Automated calibration—ensures long-term data stability and accuracy for sensor to sensor and tool to tool chamber matching