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The LEYSPEC residual gas analyser (RGA) product family enables simple and intuitive operation.
At the push of a button, you can display the partial pressures of key gases and if your process involves an additional gas, you can assign it to the spare display channel.
Due to the high bake-out temperatures achievable, the LEYSPEC is ideal for use in demanding high vacuum and ultra-high vacuum applications.
Working principle
The measurement cell is a hot cathode ionization vacuum gauge. Electrons are emitted from the hot filaments and accelerated toward the source via an electrical bias. The fast-moving electrons collide with the gas molecules, dislodging electrons, thus ionizing them. Positive gas ions provide their current to the negative loaded ion collector. Ion current is proportional to pressure. The more ions, the higher the ion current. The quadrupole array is composed of four stainless steel rods. A direct current and high frequency voltage is applied to all rods. This creates a complex magnetic field. By varying the voltage, the magnetic field is controlled.
The resulting vibration only allows ions of a specific mass to “fly” through it and reach the detection part:
Ions with an appropriate mass to charge ratio (m/e), will oscillate in a stable three-dimensional trajectory through the poles.
Ions of incorrect m/e will oscillate out of control and collide with the poles
The ions arrive in the ion collector and provide an output current which is a measure of the relative abundance of the ions getting through the filter. The ion current or partial pressure against the m/z ratio is then displayed on the unit or in the software.
Based on the described working principle, the LEYSPEC RGA verifies the gas purity by finding and displaying the gas composition. This allows the LEYSPEC to identify gas contaminants and perform further process and equipment control for an overall optimization of process performance and yield.
All-in-one device for simple and intuitive operation
Due to its high sensitivity the LEYSPEC residual gas analyzer allows detection of very small traces of contaminants or process gases. The product range has solutions for 100, 200 and 300 amu. Bake out temperature of up to 300 °C for operations in harsh environments is possible.
The LEYSPEC can be intuitively operated with its own software and integrated control and display unit. Simple residual gas analysis is possible without connecting it to a computer. Key gases can be displayed at the push of a button and a spare display is available so additional gases can be shown.
They are suitable as well for demanding test procedures and residual gas analysis in high vacuum systems.
With the preinstalled functions of the LEYSPEC, like helium leak testing, warnings and error levels for selectable gasses as well as a degassing function after the start or venting, this residual gas analyzer is a great addition to any system.
LEYSPEC Cart
The mobile residual analyzer system
The LEYSPEC Cart carries a fully integrated differential pumping system for maximum flexibility and easy handling.
It's a completely independent pumping system that is easily adaptable to a wide range of measurement tasks, with rapid operational readiness and operability at various pressures.
Our solutions:
Independent pumping system with SCROLLVAC 7 plus and TURBOVAC 350 i
Integrated process control for quick and easy operation
Easy and intuitive software for LEYSPEC RGA
Completely integrated in an independently movable cart
UHV needle valve for flexible operation at different pressure levels up to atmosphere
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