INFICON IE414 high-end vacuum sensor

The IE414 and IE514 are high-end vacuum sensors based on hot cathode ionization effect. IE414 is a Bayard-Alpert gauge while the IE514 is based on the extractor principle. These passive gauges are combined and controlled by the IM540 vacuum gauge controller. 

Thanks to the modulation of the cathode emission current, the IE414 measurement range spans over 10 decades from 10-2 mbar down to 10-11 mbar. The extractor principle allows IE514 reaching a lower measurement limit of 2×10-12 mbar thanks to its intrinsic reduction of X-ray and ion desorption effects. The IE414 and IE514 gauge heads are designed for low outgassing vacuum systems and can be baked up to extreme high temperature (400 °C). The temperature resistant gauge head cable set is also designed for high bake-out temperature, exceeding 200 °C (250 °C at the flange of the sensor).

Advantages

High accuracy of the measurements due to individually calibrated sensing system

Exchangeable cathode

Extreme high temperature bake-out up to 400 °C

IE414

Bayard-Alpert sensing principle

Measurement range to 2×10-11 mbar

Modulation of the cathode emission current (in combination with the IM540 vacuum gauge controller)

IE514

Extractor sensing principle

Lowest measurement limit, down to 2×10-12 mbar

Significant reduction of X-ray and ion desorption effects

Typical applications

Scientific and R&D applications requiring precise vacuum measurement in the ultra-high vacuum range and high temperature bake-out

Operating Units

Vacuum Gauge Controller IM540