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The INFICON Pirani Standard Gauges, PSG500, PSG502-S, PSG510-S and PSG512-S, employ the most advanced digital Pirani technology available in themarketplace.
The rugged stainless steel sensor cell and compact design qualifythem for use on semiconductor systems and for standard applications, such as fore vacuum lines.
Advantages
Easy push button ATM and HV adjustment
Space saving rugged design
Aluminum housing
Mounts in any orientation
Stainless steel measuring cell with metal-sealed feedthrough
Logarithmic signal output for easy integration
10 bar absolute overpressure with threaded connections
250 °C bakeable version
Nickel filament option for corrosive applications
Ceramic feedthrough for extremely corrosive applications (PSG510 & PSG512)
Optional setpoints
RoHS compliance
Typical applications
Controlling high vacuum ionization gauges
Fore vacuum pressure monitoring
Safety circuits in vacuum systems
General vacuum measurement and control in the fine and rough vacuum range
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