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INFICON Ion Reference Gauge IRG080

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Item: IRG080
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Description

The Ion Reference Gauge IRG080 is a first-of-a-kind vacuum sensor developed for precise total pressure measurement in vacuum systems. Based on an innovative concept of ionization vacuum gauge (the hot cathode emits electrons travelling on a straight path into a Faraday cup), IRG080 is suitable as reference standard in the range of 10-8 mbar to 10-4 mbar. 

 

IRG080 offers unmatched accuracy down to 1%, predictable gas sensitivity with a very small spread, very good short-term repeatability and reproducibility. The gauge is the ideal solution for metrology and calibration. IRG080 is connected and controlled by the IRC081 display and operating unit.

Advantages

Developed for applications requiring high measurement accuracy in the high and ultra-high vacuum range

Electrode system configuration according to ISO/WD TS 6737

True pressure for all gas species thanks to predictable relative gas sensitivity with small uncertainty

Stable electron emission and lack of influence from ESD or X-ray effects

Reproducible and easy to transport

Bakeable to 165 °C (with temperature resistant cable) or up to 400 °C without connector unit

Mu-metal intermediate piece available for magnetic shielding purposes

Operating Units

Ion Reference gauge Controller IRC081

Reference Standard

Accuracy below 1% for N2

Predictable gas sensitivity, with a very small spread (<1.5%)

True total pressure measurement

Very good short-term repeatability (<0.06%) and reproducibility (<1%)

Measurement principle

Electrons leave the cathode (left side), are accelerated by the anode to 200 eV, focused by the ion collector. The length of the electron path is well characterized and so the sensitivity of the gauge is predictable. Ions generated by electrons within the anode grid are accelerated to the collector and measured as a current. Ions generated outside the anode grid are caught by the deflector.

IRG080_Measurement principle

 

One complete package

Operating and display interface via the Ion Reference gauge Controller IRC081

The user has control on the IRG080 gauge parameters

Settings and measurement values displayed in IRC081 User Interface software (LabVIEWTM)

Data and parameter logging functionality