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INFICON temperature compensated Edge CDG025D2 with EtherCAT Capacitance Diaphragm Gauge is a highly accurate vacuum measurement instrument designed for harsh manufacturing environments.
The proven temperature compensated , corrosion resistant, ultra-pure ceramic sensor provides superior span stability over many years paired with state-of-the-art zero stability. Edge comes with the INFICON patented unique sensor shield which protects the gauge from undesired process by-products.
Advanced electronics offer a wide range of configurable signal conditioning for all applications with EtherCAT fieldbus interface.
Advantages
Easy integration, EtherCAT, wide variety of full scales and flanges, standard with two set points
Easy one push button or remote signal zero command, zero offset adjustable
Diagnostic port for quick service and maintenance
Corrosion resistant ceramic sensor
Excellent long term signal stability
Temperature compensated
Sensor protected from contamination
Compliance & standards: CE, EN, UL, SEMI, RoHS
Typical applications
Etch, PVD and other semiconductor production processes
Data storage and display manufacturing equipment
Industrial vacuum equipment
General high accuracy pressure measurement