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UNIVEX 600
The UNIVEX 600 is a compact coating system for the laboratory, respectively pilot production runs. Because of its chamber size it is suited for medium to large substrate sizes.
The attainable substrate throughput meets the general requirements for small series production runs. Substrates / substrate holders up to a max. overall diameter of 550 mm can be coated.
The system controller allows you to run manual, semi-automatic and fully automated coating processes.
Common applications
- Optical coatings
- Opto-electronic devices
- Resistive RAM
- High-temperature superconductors
Typical configurations
- Substrate heaters and/or coolers
- Multi-pocket e-beam with thermal evaporator and ion source.
- Palette, domed or planetary substrate configurations for single or multiple samples
- Multiple-sputter guns in confocal or face-to-face configuration