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SI-310 is a built-in pyrolyzer sampling type fixed gas detector to easily detect Hexafluorobutadiene, Octafluorocyclopentene, Difluoromethane and Fluoromethane gases through a sensor cartridge on a real-time basis. The measured gas concentration is transmitted in real time with an output of 4-20 mA and can be configured through three internal relays. In addition, users also can widely benefit from control set of RS-485/Ethernet/Bluetooth connection.
FEATURES
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Explosion-Proof structure
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Cartridge type sensor – Easy maintenance
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Built-in flow control function
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Large LCD with Digital Concentration Indication and Digital Flow Indication
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Control set of 4 Button / RS485 / TCP Ethernet / Bluetooth
APPLICATION
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Semiconductor industry
Product Specifications
| Model | SI-310 |
|---|---|
| Size | 212(W) x 225(D) x 141.7(H) mm |
| Weight | Approx. 6.5kg |
| Power Supply | DC : 24V ±10% PoE : 36V~57V (Typical : 48V) |
| Flow Rate | 100~1000ml (Normal 300~500ml/min) |
| Power Consumption | Approx. 15W @+24VDC (Pyrolyzer Use 600mA @+24Vdc) |
| Display | FND, Gas Concentration, Flow, Alarm, Device Fault |
| Relay | 1st Alarm, 2nd Alarm, Device Fault |
| Output | Analog - 4~20mA |
| Digital Communication | RS-485, TCP Ethernet (PoE) |
| Sampling Distance | Inlet Gas Tube: Max 30m (FEP) Exhaust Gas Tube: Max 30m (FEP) |
| Tube Spec | 1/4” Teflon Tube |
| Operating Temp | -40℃ ~ +55℃ |
| Input & Setting | 4 Button, RS485, Ethernet & Wireless |
| Warranty (Device) | 2 Years |
| Warranty (Sensor) | 1 Year |
| Remote Interface | Ethernet (PoE), RS-485, HART (optional) |
| Wiring | 4 to 20mA / DC Power / Relay: Max 14 AWG / Ethernet: RJ-45 Cat.5E |
| Pressure Range | 90 to 100kPa |
| Max Sample Flow | Max 1,000ml |
| Max Sample Pressure | 6kPa |
| Explosion-proof | KCs: Ex db IIC T6 Gb |
Sensor Specifications
| Gas | Sensor | Range | A1 | A2 | Resolution |
|---|---|---|---|---|---|
| Hexafluorobutadiene(C₄F₆) | Electrochemical | 0~40 ppm | 10 ppm | 20 ppm | 1.5 ppm |
| Octafluorocyclopentene(C₅F₈) | Electrochemical | 0~40 ppm | 5 ppm | 10 ppm | 2.0 ppm |
| Difluoromethane(CH₂F₂) | Electrochemical | 0~120 ppm | 15 ppm | 30 ppm | 6.0 ppm |
| Fluoromethane(CH₃F) | Electrochemical | 0~120 ppm | 15 ppm | 30 ppm | 8.0 ppm |