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UNIVEX 400
The UNIVEX 400 is a compact coating system for laboratory tasks, respectively pilot production runs. Due to its chamber dimensions, it is ideal for coating of small to medium sized substrates.
Substrates / substrate holders up to an overall diameter of max. 350 mm can be coated.
The system controller allows you to run manual, semiautomatic and fully automatic coating processes.
Common applications
- Thin film solar: CdTe, CIGS, CZTS sputtered processes
- Organic electronics (PV, OLEDS)
- Optical coatings
- Microelectronics
Typical configurations
- Multi-pocket e-beam with thermal evaporator and ion source.
- Up to four 2” sputter guns in confocal configuration for sputter up or down
- E-beam and organics evaporators for inorganic-organic perovskite formation