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INFICON Bayard-Alpert Pirani Capacitance Diaphragm Gauge BCG450

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Item: BCG450
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Description

The INFICON Bayard-Alpert Pirani Capacitance Diaphragm Gauge (Triple-Gauge™), BCG450, combines the advantages of three different technologies in a single, compact, economical package to measure process and base pressure from 5×10-10 to 1500 mbar (3.75×10-10 to 1125 Torr). 

 

The BCG450 is designed to take the place of three sensors (hot ion, convection enhanced Pirani and vacuum switch), thus reducing cost and valuable tool space.

 

Also available wth Profinet digital interface.

Advantages

BCG450 saves cost and tool space and reduces the complexity of vacuum measurement installation and setup

Gas-type-independent pressure measurement above 10 Torr provides more reliable loadlock control for any gas mixture

Pirani interlock protects the hot filament from premature burnout

Automatic high vacuum Pirani adjustment reduces operator interventions

Differential pressure measurement at atmosphere eliminates uncertainty related to atmospheric pressure changes

Easy-to-exchange sensing element with on-board calibration data guarantees reproducibility

Optional graphic display and Fieldbus interfaces available

RoHS compliance

Typical applications

Pressure measurement in Semiconductor process, transfer and loadlock chambers

Industrial coating

General vacuum measurement and control on systems in the low to ultra high vacuum range