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INFICON Edge Capacitance Diaphragm Gauge is a highly accurate vacuum measurement instrument designed for harsh manufacturing environments.
The proven temperature controlled, corrosion resistant, ultra-pure ceramic sensor provides superior span stability over many years paired with state-of-the-art zero stability. Edge comes with the INFICON patented unique sensor shield which protects the gauge from undesired process by-products. Advanced electronics offer a wide range of configurable signal conditioning for all applications and optional EtherCAT fieldbus interface.
The innovative heating concept enables a cool to the touch surface and saves valuable tool space. INFICON Edge is the smallest vacuum measurement instrument of its kind.
Advantages
Compact, saves valuable tool space
Easy integration, EtherCAT, wide variety of full scales and flanges, standard with two set points
Easy one push button or remote signal zero command, zero offset adjustable
Diagnostic port for quick service and maintenance
Two year warranty, longer life time with advanced heating concept and gauge protection
No long term recalibration due to excellent signal stability and repeatability, even in harsh plasma applications
Compliance & standards: CE, EN, UL, SEMI, RoHS
Typical applications
CVD, Etch, PVD and other semiconductor production processes