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Tailored solutions for specific applications
In order to ensure a successful and reproducible coating process, we developed a turnable, heatable substrate stage allowing great homogeneities and coating quality.
To meet your different needs, we offer a modular system that consists of three main versions:
- Basic
- Advanced
- Full featured
From which we can derive 576 possible variants!
Modular system
Based on its modular principle, the TWISTER™ substrate stage is a typical upgradable device which only requires additional pneumatic clamps in case a load lock is added. If cooling is needed, just exchange the heating plate with a combined heating + cooling plate.
Precise handling for accurate results
- Uniform and homogeneous thin films thanks to accurate rotating of the substrate
- Optional Z-shift to adjust the substrate's distance to the coating sources and for load lock handovers
- Flexibility of the substrate plates with diameters of up to 6 inches
- Improved layer quality by heating up to 400 °C
- Optional water cooling:
- Protects sensitive substrates like foils and OLED materials
- Quicker cooldown and subsequent processing
- Easily exchangeable coating shield for cleaning
- Included position control
- Possible upgrade of most existing lab coating devices